DEEP SUB MICRON CMOS TECHNOLOGY LECTURE NOTES
DEEP SUBMICRON (DSM) CMOS TECHNOLOGY LECTURE ORGANIZATION
• Characteristics of a deep submicron CMOS technology
• Typical deep submicron CMOS technology
If the n+ to p+ spacing is large, the Bird’s beak can be compensated using techniques
such as poly buffered LOCOS
• At some point as the n+ to p+ spacing gets smaller, the restricted bird’s beak leads to
undesirable stress effects in the transistor.
• An important advantage of STI is that it minimizes the heat cycle needed for n+ or p+
isolation compared to LOCOS. This is a significant advantage for any process where
there are implants before STI.